Spectroscopic diagnostic complex based on the magnetron sputtering device with a digital method of the data mining

  • Afanasіeva I.A. V.N. Karazin Kharkov National University, Kharkov, Ukraine.
  • Afanasiev S.N. V.N. Karazin Kharkov National University, Kharkov, Ukraine.
  • Azarenkov N.A. V.N. Karazin Kharkov National University, Kharkov, Ukraine.
  • Bobkov V.V. V.N. Karazin Kharkov National University, Kharkov, Ukraine.
  • Gritsyna V.V. V.N. Karazin Kharkov National University, Kharkov, Ukraine.
  • Okseniuk I.I. V.N. Karazin Kharkov National University, Kharkov, Ukraine.
  • Skrypnyk A.A. V.N. Karazin Kharkov National University, Kharkov, Ukraine.
  • Shevchenko D.I. V.N. Karazin Kharkov National University, Kharkov, Ukraine.
Keywords: Data mining, Magnetron sputtering, Plasma, Spectroscopy

Abstract

A diagnostic complex based on a magnetron sputtering device is proposed for studying a magnetron discharge plasma parameter by optical emission spectroscopy, using two spectroscopic systems: photographic and photoelectric. Software for digital processing of the obtained emission spectra is developed. The results obtained by the two spectroscopic systems are compared.

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Published
2020-11-30
How to Cite
I.A., A., S.N., A., N.A., A., V.V., B., V.V., G., I.I., O., A.A., S., & D.I., S. (2020). Spectroscopic diagnostic complex based on the magnetron sputtering device with a digital method of the data mining. Frontiers in Advanced Materials Research, 2(2), 1-8. https://doi.org/10.34256/famr2021



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