M, Vanamoorthy, and Bindu Salim. “Study on C-Axis Orientation of AlN Thin Film on the Influence Al Buffer Layer and Ar/N2 Gas Flow Ratio in Reactive Magnetron Sputtering”. Frontiers in Advanced Materials Research 5, no. 2 (December 12, 2023): 13-18. Accessed May 16, 2024. https://sietjournals.com/index.php/famr/article/view/212.